Characterization of PillarHall test chip structures using a reflectometry technique
Loading...
Access rights
openAccess
Journal Title
Journal ISSN
Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
This publication is imported from Aalto University research portal.
View publication in the Research portal
View/Open full text file from the Research portal
Other link related to publication
View publication in the Research portal
View/Open full text file from the Research portal
Other link related to publication
Date
2023-09
Major/Subject
Mcode
Degree programme
Language
en
Pages
Series
Measurement Science and Technology, Volume 34, issue 9
Abstract
Thin film samples where one of the thin layers consists of a vacuum or air are called PillarHalls due to their support structure in silicon wafers. Custom PillarHall samples were provided by Chipmetrics Ltd and characterized by reflectometry with a Cary 7000 spectrometer. Data at 8° of angle of incidence were collected with p-polarization of the incident light within the wavelength range of 550-1800 nm. These data were then analyzed with a dedicated MATLAB code, using fitting software accompanying the transfer matrix method for calculation of the reflectance spectrum. Layer thicknesses and unknown refractive indices were chosen as fitted parameters. The oscillating reflectance spectrum of the PillarHall test chip yielded an air gap thickness of 86 nm with an estimated standard uncertainty of 5 nm. This is close to the nominal value of 100 nm. The results demonstrate that reflectometry data are sensitive to the thickness of the thin air layer deep inside the silicon structure.Description
Funding Information: The project 20IND04 ATMOC leading to this publication has received funding from the European Metrology Programme for Innovation and Research (EMPIR) co-financed by the participating states and the European Union’s Horizon 2020 research and innovation program. We also acknowledge support by the Academy of Finland Flagship Programme, Photonics Research and Innovation (PREIN), Decision Number: 320167. Publisher Copyright: © 2023 The Author(s). Published by IOP Publishing Ltd.
Keywords
conformal thin film, modeling, PillarHall, reflectometry
Other note
Citation
Danilenko , A , Rastgou , M , Manoocheri , F , Kinnunen , J , Korpelainen , V , Lassila , A & Ikonen , E 2023 , ' Characterization of PillarHall test chip structures using a reflectometry technique ' , Measurement Science and Technology , vol. 34 , no. 9 , 094006 . https://doi.org/10.1088/1361-6501/acda54
