Kapasitiivisen piipohjaisen värähtelevän mikromekaanisen kulmanopeusanturin herkkyysanalyysi
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Helsinki University of Technology |
Diplomityö
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Instructions for the author
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Date
2009
Department
Major/Subject
Materiaalitiede
Mcode
MT-45
Degree programme
Language
fi
Pages
96 + [39]
Series
Description
Supervisor
Hannula, Simo-PekkaThesis advisor
Törmälehto, KimmoKeywords
MEMS, MEMS, angular rate sensor, kulmanopeusanturi, sensitivity, herkkyys, scale factor, luotettavuustestaus, reliability testing