Aktiivisen fotonikiderakenteen suunnittelu ja valmistus
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Journal Title
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Volume Title
Helsinki University of Technology |
Diplomityö
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Instructions for the author
Authors
Date
2000
Department
Major/Subject
Optoelektroniikka
Mcode
S-104
Degree programme
Language
fi
Pages
vi + 62
Series
Description
Supervisor
Lipsanen, HarriThesis advisor
Varis, KarriKeywords
photonic crystal, fotonikide, waveguide, aaltojohde, MOVPE, elektronisuihkulitografia, electron beam lithography