Electron Beam Lithography
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URL
Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology |
Licentiate thesis
Authors
Date
1999
Department
Major/Subject
Elektronifysiikka
Mcode
S-69
Degree programme
Language
en
Pages
73
Series
Description
Supervisor
Sinkkonen, JuhaKeywords
scanning electron microscope, electron beam lithography, liftoff, reactive ion etching, anisotropic etching, fluorine gases, silicon nanostructures