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Electron Beam Lithography

Helsinki University of Technology | Licentiate thesis

Authors

Date

Department

Sähkö- ja tietoliikennetekniikan osasto

Major/Subject

Elektronifysiikka

Mcode

S-69

Language

en

Pages

73

Supervisor

Sinkkonen, Juha

Keywords

scanning electron microscope, electron beam lithography, liftoff, reactive ion etching, anisotropic etching, fluorine gases, silicon nanostructures

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-202104145217

Collections

[lic] Teknillinen korkeakoulu / TKK

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