Phosphorus and boron diffusion gettering of iron in monocrystalline silicon
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Journal of Applied Physics, Volume 109, issue 9
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Talvitie, H, Vähänissi, V, Haarahiltunen, A, Yli-Koski, M & Savin, H 2011, 'Phosphorus and boron diffusion gettering of iron in monocrystalline silicon', Journal of Applied Physics, vol. 109, no. 9. https://doi.org/10.1063/1.3582086