Black silicon fabrication by plasma etching
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Kemiantekniikan korkeakoulu |
Bachelor's thesis
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Authors
Date
2018-07-04
Department
Major/Subject
Bio- ja kemiantekniikka
Mcode
CHEM3012
Degree programme
Kemiantekniikan kandidaattiohjelma
Language
en
Pages
31
Series
Description
Supervisor
Rautkari, LauriThesis advisor
Franssila, SamiKeywords
black silicon, photonics, silicon, deep reactive ion etching, reactive ion etching, Bosch process