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EBIC-analyysi ja -laitteisto puolijohteiden karakterisoinnissa

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Helsinki University of Technology | Master's thesis
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Date

1994

Department

Sähkötekniikan osasto

Major/Subject

Elektronifysiikka

Mcode

S-69

Degree programme

Language

fi

Pages

79

Series

Description

Supervisor

Sinkkonen, Juha

Thesis advisor

Hovinen, Anssi

Keywords

scanning electron microscope, pyyhkäisyelektronimikroskooppi, SEM, SEM, diffusion-length, diffuusiopituus, EBIC, EBIC, surface recombination velocity, pintarekomninaationopeus, lifetime, elinaika

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https://urn.fi/URN:NBN:fi:aalto-2020120341530

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[dipl] Teknillinen korkeakoulu / TKK

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