1D Crystallographic Etching of Few-Layer WS2

Abstract

Layer number-dependent band structures and symmetry are vital for the electrical and optical characteristics of 2D transition metal dichalcogenides (TMDCs). Harvesting 2D TMDCs with tunable thickness and properties can be achieved through top-down etching and bottom-up growth strategies. In this study, a pioneering technique that utilizes the migration of in situ generated Na-W-S-O droplets to etch out 1D nanotrenches in few-layer WS2 is reported. 1D WS2 nanotrenches are successfully fabricated on the optically inert bilayer WS2, showing pronounced photoluminescence and second harmonic generation signals. Additionally, the modulation of inkjet-printed Na2WO4-Na2SO4 particles to switch between the etching and growth modes by manipulating the sulfur supply is demonstrated. This versatile approach enables the creation of 1D nanochannels on 2D TMDCs. The research presents exciting prospects for the top-down and bottom-up fabrication of 1D-2D mixed-dimensional TMDC nanostructures, expanding their use for electronic and optoelectronic applications.