Molecular vapor deposition in high-aspect-ratio microstructures
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URL
Journal Title
Journal ISSN
Volume Title
Kemian tekniikan korkeakoulu |
Master's thesis
Authors
Date
2019-03-12
Department
Major/Subject
Functional Materials
Mcode
CHEM3025
Degree programme
Master's Programme in Chemical, Biochemical and Materials Engineering
Language
en
Pages
82
Series
Description
Supervisor
Franssila, SamiThesis advisor
Cura, ErkinKeywords
molecular vapor deposition, high-aspect-ratio, dichlorodimethylsilane, quantitative nanomechanical mapping