Cathodic arc deposited tetrahedral amorphous carbon as thin film contact pressure sensing material
Loading...
Access rights
openAccess
publishedVersion
URL
Journal Title
Journal ISSN
Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
This publication is imported from Aalto University research portal.
View publication in the Research portal (opens in new window)
View/Open full text file from the Research portal (opens in new window)
Other link related to publication (opens in new window)
View publication in the Research portal (opens in new window)
View/Open full text file from the Research portal (opens in new window)
Other link related to publication (opens in new window)
Date
Major/Subject
Mcode
Degree programme
Language
en
Pages
6
Series
AIP Advances, Volume 14, issue 10, pp. 105321
Abstract
Tetrahedral amorphous carbon (ta-C) film was deposited using the filtered pulsed cathodic arc deposition method. The ta-C structures deposited on high velocity oxygen fuel thermally sprayed steel beam substrates were investigated for piezoresistive properties under direct contact pressing. A load of up to 1.4 GPa was applied with point contact, with no detrimental influence on the material. The linear response for the strain applied homogeneously on the whole film surface and on the local portion of the film surface under a cylindrical contact was observed. A high gauge factor of the measured system of 305 was measured, showing the potential of the material as a good candidate for sensing applications on direct contact measurement devices.Description
Keywords
Other note
Citation
Haikola, J, Tervakangas, S, Kolehmainen, J & Tittonen, I 2024, 'Cathodic arc deposited tetrahedral amorphous carbon as thin film contact pressure sensing material', AIP Advances, vol. 14, no. 10, 105321, pp. 105321 . https://doi.org/10.1063/5.0220295