Surface passivation of germanium with atomic layer deposited Al2O3
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Sähkötekniikan korkeakoulu |
Master's thesis
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Authors
Date
2019-12-16
Department
Major/Subject
Translational engineering
Mcode
ELEC3023
Degree programme
AEE - Master’s Programme in Automation and Electrical Engineering (TS2013)
Language
en
Pages
41+7
Series
Description
Supervisor
Savin, HeleThesis advisor
Pasanen, ToniVähänissi, Ville
Keywords
Germanium, surface passivation, preconditioning, hydrochloric acid, surface recombination, atomic layer deposition