Surface passivation of germanium with atomic layer deposited Al2O3

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Journal Title

Journal ISSN

Volume Title

Sähkötekniikan korkeakoulu | Master's thesis

Date

2019-12-16

Department

Major/Subject

Translational engineering

Mcode

ELEC3023

Degree programme

AEE - Master’s Programme in Automation and Electrical Engineering (TS2013)

Language

en

Pages

41+7

Series

Description

Supervisor

Savin, Hele

Thesis advisor

Pasanen, Toni
Vähänissi, Ville

Keywords

Germanium, surface passivation, preconditioning, hydrochloric acid, surface recombination, atomic layer deposition

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