Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorLipiäinen, L.
dc.contributor.authorJaakkola, A.
dc.contributor.authorKokkonen, K.
dc.contributor.authorKaivola, M.
dc.contributor.departmentDepartment of Applied Physicsen
dc.contributor.groupauthorOptics and Photonicsen
dc.date.accessioned2025-10-08T07:19:56Z
dc.date.available2025-10-08T07:19:56Z
dc.date.issued2012
dc.description.abstractWe present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.en
dc.description.versionPeer revieweden
dc.format.extent3
dc.format.mimetypeapplication/pdf
dc.identifier.citationLipiäinen, L, Jaakkola, A, Kokkonen, K & Kaivola, M 2012, 'Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance', Applied Physics Letters, vol. 100, no. 1, 013503, pp. 1-3. https://doi.org/10.1063/1.3673558en
dc.identifier.doi10.1063/1.3673558
dc.identifier.issn1077-3118
dc.identifier.otherPURE UUID: a2361d4d-ba88-4a3e-b63e-0d8f33c18318
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/a2361d4d-ba88-4a3e-b63e-0d8f33c18318
dc.identifier.otherPURE LINK: http://dx.doi.org/10.1063/1.3673558
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/13707829/1_2E3673558.pdf
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/139765
dc.identifier.urnURN:NBN:fi:aalto-202510087946
dc.language.isoenen
dc.publisherAmerican Institute of Physics
dc.relation.ispartofseriesApplied Physics Lettersen
dc.relation.ispartofseriesVolume 100, issue 1, pp. 1-3en
dc.rightsopenAccessen
dc.subject.keywordlaser interferometry
dc.subject.keywordMEMS
dc.titleFrequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonanceen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionpublishedVersion

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