Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance
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A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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en
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3
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Applied Physics Letters, Volume 100, issue 1, pp. 1-3
Abstract
We present an experimental study of the frequency scaling of the main, square-extensional mode in a piezoelectrically actuated plate resonator. The studied set consists of resonators of different plate sizes with identical anchors. The behavior of the square-extensional mode is analyzed using electrical impedance measurements and optical characterization of the mechanical vibration fields. The results reveal a detrimental anchor effect, where for certain plate sizes the square-extensional mode branch is split into two due to a coupled oscillation of the resonator plate and the anchors.Description
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Lipiäinen, L, Jaakkola, A, Kokkonen, K & Kaivola, M 2012, 'Frequency splitting of the main mode in a microelectromechanical resonator due to coupling with an anchor resonance', Applied Physics Letters, vol. 100, no. 1, 013503, pp. 1-3. https://doi.org/10.1063/1.3673558