Synchrotron radiation x-ray topography and defect selective etching analysis of threading dislocations in GaN
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School of Electrical Engineering |
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Date
2014
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Mcode
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Language
en
Pages
083504/1-9
Series
Journal of Applied Physics, Volume 116, Issue 8
Abstract
The crystal quality of bulk GaN crystals is continuously improving due to advances in GaN growth techniques. Defect characterization of the GaN substrates by conventional methods is impeded by the very low dislocation density and a large scale defect analysis method is needed. White beam synchrotron radiation x-ray topography (SR-XRT) is a rapid and non-destructive technique for dislocation analysis on a large scale. In this study, the defect structure of an ammonothermal c-plane GaN substrate was recorded using SR-XRT and the image contrast caused by the dislocation induced microstrain was simulated. The simulations and experimental observations agree excellently and the SR-XRT image contrasts of mixed and screw dislocations were determined. Apart from a few exceptions, defect selective etching measurements were shown to correspond one to one with the SR-XRT results.Description
Keywords
dislocations, etching, x-ray diffraction, topography, epitaxy
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Citation
Sintonen, Sakari & Rudzinski, Mariusz & Suihkonen, Sami & Jussila, Henri & Knetzger, Michael & Meissner, Elke & Danilewsky, Andreas & Tuomi, Turkka O. & Lipsanen, Harri. 2014. Synchrotron radiation x-ray topography and defect selective etching analysis of threading dislocations in GaN. Journal of Applied Physics. Volume 116, Issue 8. P. 083504/1-9. ISSN 0021-8979 (printed). DOI: 10.1063/1.4893901.