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Applications of atomic layer deposition in nanophotonics
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A4 Artikkeli konferenssijulkaisussa
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SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014, Proceedings of SPIE ; Volume 8988
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Karvonen, L, Säynätjoki, A, Roussey, M, Kuittinen, M & Honkanen, S 2014, Applications of atomic layer deposition in nanophotonics. in J Emmanuel Broquin & G Nunzi Conti (eds), SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014., 89880Z, Proceedings of SPIE, vol. 8988, SPIE. https://doi.org/10.1117/12.2042263