Liquid phase deposition of silicon dioxide thin films

Thumbnail Image

URL

Journal Title

Journal ISSN

Volume Title

Helsinki University of Technology | Master's thesis
Checking the digitized thesis and permission for publishing
Instructions for the author
Location:
P1 Ark TKK

Authors

Date

2002

Department

Kemian tekniikan osasto

Major/Subject

Epäorgaaninen kemia

Mcode

Kem-35

Degree programme

Language

en

Pages

vii + 51 s. + liitt.

Series

Description

Supervisor

Niinistö, Lauri

Thesis advisor

Franssila, Sami

Keywords

Other note

Citation

Permanent link to this item

https://urn.fi/URN:NBN:fi:aalto-2020120448470

Collections

[dipl] Teknillinen korkeakoulu / TKK