Glass Polarization Induced Drift in Microelectromechanical Capacitor

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorHaarahiltunen, Antti
dc.contributor.authorVarpula, Aapo
dc.contributor.authorLeinvuo, Jouni
dc.contributor.authorSiren, Esko
dc.contributor.authorRytkönen, Vesa-Pekka
dc.contributor.authorSavin, Hele
dc.contributor.departmentDepartment of Micro and Nanosciencesen
dc.contributor.departmentMikro- ja nanotekniikan laitosfi
dc.contributor.schoolSähkötekniikan korkeakoulufi
dc.contributor.schoolSchool of Electrical Engineeringen
dc.date.accessioned2015-04-09T09:01:17Z
dc.date.available2015-04-09T09:01:17Z
dc.date.issued2012
dc.description.abstractWe present a quantitative physical model for glass substrate polarization and study the glasspolarization by measuring the capacitance drift from microelectromechanicalcapacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.en
dc.description.versionPeer revieweden
dc.format.extent4
dc.format.mimetypeapplication/pdfen
dc.identifier.citationHaarahiltunen, Antti & Varpula, Aapo & Leinvuo, Jouni & Siren, Esko & Rytkönen, Vesa-Pekka & Savin, Hele. 2012. Glass Polarization Induced Drift in Microelectromechanical Capacitor. Journal of Applied Physics. Volume 111, Number 10. 1089-7550 (electronic). DOI: 10.1063/1.4720378en
dc.identifier.doi10.1063/1.4720378
dc.identifier.issn1089-7550 (electronic)
dc.identifier.issn0021-8979 (printed)
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/15599
dc.identifier.urnURN:NBN:fi:aalto-201504092252
dc.language.isoenen
dc.publisherAIP Publishingen
dc.relation.ispartofseriesJournal of Applied Physicsen
dc.relation.ispartofseriesVolume 111, Number 10
dc.rightsCopyright 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/japen
dc.rights.holderAmerican Institute of Physics
dc.subject.keywordglass polarizationen
dc.subject.keywordmicroelectromechanical capacitoren
dc.subject.keywordglass substrateen
dc.subject.keywordcapacitance driften
dc.subject.keyworddrift behaviouren
dc.subject.keywordphysical modelsen
dc.subject.keywordMEM capacitoren
dc.subject.otherElectrical engineeringen
dc.subject.otherPhysicsen
dc.titleGlass Polarization Induced Drift in Microelectromechanical Capacitoren
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.dcmitypetexten
dc.type.versionFinal published versionen
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