Glass Polarization Induced Drift in Microelectromechanical Capacitor
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Copyright 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/jap
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School of Electrical Engineering |
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
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Date
2012
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Mcode
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Language
en
Pages
4
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Journal of Applied Physics, Volume 111, Number 10
Abstract
We present a quantitative physical model for glass substrate polarization and study the glasspolarization by measuring the capacitance drift from microelectromechanicalcapacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures.Description
Keywords
glass polarization, microelectromechanical capacitor, glass substrate, capacitance drift, drift behaviour, physical models, MEM capacitor
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Citation
Haarahiltunen, Antti & Varpula, Aapo & Leinvuo, Jouni & Siren, Esko & Rytkönen, Vesa-Pekka & Savin, Hele. 2012. Glass Polarization Induced Drift in Microelectromechanical Capacitor. Journal of Applied Physics. Volume 111, Number 10. 1089-7550 (electronic). DOI: 10.1063/1.4720378
