Development of a PECVD Grown Passivating and Antireflecting Silicon Nitride Coating for Crystalline Silicon Solar Cells

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Helsinki University of Technology | Licentiate thesis
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Date

1999

Department

Sähkö- ja tietoliikennetekniikan osasto

Major/Subject

Elektronifysiikka

Mcode

S-69

Degree programme

Language

en

Pages

126

Series

Description

Supervisor

Sinkkonen, Juha

Keywords

antireflecting coating, antireflekterande filma, ARC, ARC, passivating, kiselnitrid, PECVD, passiverande, Plasma Enhanced Chemical Vapor Deposi`, PECVD, silicon nitride, SiN

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https://urn.fi/URN:NBN:fi:aalto-202104145216

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[lic] Teknillinen korkeakoulu / TKK