Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation
Loading...
Access rights
openAccess
publishedVersion
URL
Journal Title
Journal ISSN
Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
This publication is imported from Aalto University research portal.
View publication in the Research portal (opens in new window)
View/Open full text file from the Research portal (opens in new window)
Other link related to publication (opens in new window)
View publication in the Research portal (opens in new window)
View/Open full text file from the Research portal (opens in new window)
Other link related to publication (opens in new window)
Date
2020-03-18
Department
Major/Subject
Mcode
Degree programme
Language
en
Pages
10
Series
Separation and Purification Technology, Volume 235
Abstract
Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was ~19%.Description
Keywords
Chemical mechanical planarization, Energy analysis, Membrane distillation, Nano-electronics, Separation efficiency
Other note
Citation
Noor, I E, Coenen, J, Martin, A & Dahl, O 2020, ' Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation ', Separation and Purification Technology, vol. 235, 116201 . https://doi.org/10.1016/j.seppur.2019.116201