Development of piezoelectric microelectromechanical systems for multiaxial motion and sensing

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.advisorRoss, Glenn, Dr., Aalto University, Department of Electrical Engineering and Automation, Finland
dc.contributor.authorBespalova, Kristina
dc.contributor.departmentSähkötekniikan ja automaation laitosfi
dc.contributor.departmentDepartment of Electrical Engineering and Automationen
dc.contributor.labElectronics Integration and Reliabilityen
dc.contributor.schoolSähkötekniikan korkeakoulufi
dc.contributor.schoolSchool of Electrical Engineeringen
dc.contributor.supervisorPaulasto-Kröckel, Mervi, Prof., Aalto University, Department of Electrical Engineering and Automation, Finland
dc.date.accessioned2024-03-04T10:00:48Z
dc.date.available2024-03-04T10:00:48Z
dc.date.defence2024-03-15
dc.date.issued2024
dc.description.abstractPiezoelectric materials offer several advantages for MEMS applications due to their superior direct electromechanical coupling and low voltage consumption, especially when compared to electrostatic-based MEMS. Integrating piezoelectric thin films in MEMS also allows for a significantly smaller chip footprint than devices employing other transduction techniques. Furthermore, thin piezoelectric films can be integrated into the fabrication of multifunctional devices capable of three-dimensional motion (3D motion). Such 3D piezoMEMS enable driving and sensing along the x, y, or z-axes using components of a single element. This distinguishes 3D piezoMEMS from conventional MEMS that utilize elements that often facilitate motion in only one direction. This dissertation investigates the development of a new fabrication approach and adapting and optimizing existing fabrication techniques for 3D piezoMEMS fabrication. Pure lateral motion of a single MEMS element is implemented by placing metal organic chemical vapour deposited aluminium nitride (MOCVD AlN) thin films on the vertical surfaces of the Si cantilever. The fabrication approach demonstrated in the work unlocks the piezoelectric and electrode material deposition potential on vertical sidewall structures in the fabrication of advanced 3D piezoMEMS.en
dc.format.extent80 + app. 68
dc.format.mimetypeapplication/pdfen
dc.identifier.isbn978-952-64-1695-3 (electronic)
dc.identifier.isbn978-952-64-1694-6 (printed)
dc.identifier.issn1799-4942 (electronic)
dc.identifier.issn1799-4934 (printed)
dc.identifier.issn1799-4934 (ISSN-L)
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/126840
dc.identifier.urnURN:ISBN:978-952-64-1695-3
dc.language.isoenen
dc.opnSarro, Pasqualina Maria, Prof., Delft University of Technology, Netherlands
dc.publisherAalto Universityen
dc.publisherAalto-yliopistofi
dc.relation.haspartKristina Bespalova, Elmeri Österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala. 2021. Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication. IEEE. Journal of Microelectromechanical Systems, volume 30, issue 2 (April 2021), p. 290-298. Full text in Acris/Aaltodoc: https://urn.fi/URN:NBN:fi:aalto-202102262074. DOI: 10.1109/JMEMS.2021.3056928en
dc.relation.haspartKristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Ross Glenn, Mervi Paulasto-Kröckel. 2023. In-Plane AlN-based Actuator: Toward a New Generation of Piezoelectric MEMS. Wiley. Advanced Electronic Materials , vol. 9 , no. 8 , 2300015. Full text in Acris/Aaltodoc: https://urn.fi/URN:NBN:fi:aalto-202308114727. DOI: 10.1002/aelm.202300015en
dc.relation.haspartKristina Bespalova, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel. 2024. Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication. Wiley. Advanced Electronic Materials, Jan 15, p.2300628. Full text in Acris/Aaltodoc: https://urn.fi/URN:NBN:fi:aalto-202401312260. DOI: 10.1002/aelm.202300628en
dc.relation.haspartElmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel. 2021. Atomic layer deposition of AlN using atomic layer annealing - Towards high-quality AlN on vertical sidewalls. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, volume 39, no. 3, p. 032403. Full text in Acris/Aaltodoc: https://urn.fi/URN:NBN:fi:aalto-202103312669. DOI: 10.1116/6.0000724en
dc.relation.haspartArtem Gabrelian, Glenn Ross, Kristina Bespalova, Mervi Paulasto-Kröckel. 2022. Unlocking the Potential of Piezoelectric Films Grown on Vertical Surfaces for Inertial MEMS. Materials Today Communications, volume 33, p. 104522. Full text in Acris/Aaltodoc: https://urn.fi/URN:NBN:fi:aalto-202212076793. DOI: 10.1016/j.mtcomm.2022.104522en
dc.relation.ispartofseriesAalto University publication series DOCTORAL THESESen
dc.relation.ispartofseries43/2024
dc.revPillai, Gayathri, Assist. Prof., Indian Institute of Science (IISc), India
dc.revAssociate Professor Tabrizian, Roozbeh, Assoc. Prof., University of Florida, USA
dc.subject.keywordaluminium nitrideen
dc.subject.keywordmicroelectromechanical systemsen
dc.subject.keywordmetal organic chemical vapour depositionen
dc.subject.keywordvertical sidewallsen
dc.subject.keywordvertical surfacesen
dc.subject.keywordaluminium scandium nitrideen
dc.subject.keywordpiezoelectric materialsen
dc.subject.keywordpiezoelectricityen
dc.subject.keywordmicrostructureen
dc.subject.keywordthin filmsen
dc.subject.keywordX-ray diffractionen
dc.subject.keywordmicrofabricationen
dc.subject.keywordscanning transmission electron microscopyen
dc.subject.keywordfinite-element methoden
dc.subject.keywordsurface qualityen
dc.subject.keywordcavity first approachen
dc.subject.keywordmotion testen
dc.subject.otherElectrical engineeringen
dc.titleDevelopment of piezoelectric microelectromechanical systems for multiaxial motion and sensingen
dc.typeG5 Artikkeliväitöskirjafi
dc.type.dcmitypetexten
dc.type.ontasotDoctoral dissertation (article-based)en
dc.type.ontasotVäitöskirja (artikkeli)fi
local.aalto.acrisexportstatuschecked 2024-03-15_0818
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local.aalto.formfolder2024_03_04_klo_09_55
local.aalto.infraOtaNano
local.aalto.infraOtaNano - Aalto Nanofab - Micronova
local.aalto.infraOtaNano - Nanomicroscopy Center
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