Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation

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dc.contributorAalto-yliopistofi
dc.contributorAalto Universityen
dc.contributor.authorNoor, Imtisal e.en_US
dc.contributor.authorCoenen, Janen_US
dc.contributor.authorMartin, Andrewen_US
dc.contributor.authorDahl, Ollien_US
dc.contributor.authorÅslin, Miriamen_US
dc.contributor.departmentSchool common, CHEMen
dc.contributor.departmentDepartment of Bioproducts and Biosystemsen
dc.contributor.groupauthorBiohybrid Materialsen
dc.contributor.groupauthorClean Technologiesen
dc.contributor.organizationIMEC Vzwen_US
dc.contributor.organizationKTH Royal Institute of Technologyen_US
dc.contributor.organizationXzero ABen_US
dc.date.accessioned2019-04-02T06:58:27Z
dc.date.available2019-04-02T06:58:27Z
dc.date.issued2019-06-01en_US
dc.description.abstractIn nano-electronics manufacturing, tetramethylammonium hydroxide (TMAH) is extensively used in the photo-lithography and etching processes, leading to a waste disposal issue. The present study focuses on TMAH wastewater treatment in nano-electronics industries by using membrane distillation technology. Actual TMAH wastewater samples were collected at imec, Belgium. An air gap membrane distillation bench unit was employed to perform the experiments for different operating conditions i.e., feed temperatures and flow rates. High quality water is recovered after reducing the TMAH concentration to 1 ppm and lowering the TOC to 0.8 ppm from 8 ppm. For the industrial scale TMAH wastewater treatment, industrial waste heat driven and district heating driven membrane distillation systems are designed and analyzed. It is determined that 14 GWh thermal energy is required annually to treat 20,000 m 3 of TMAH wastewater/year while considering 65 °C as the membrane distillation feed temperature. Expected unit water treatment cost is found as low as 16 $/m 3 of TMAH wastewater, roughly 80% lower than current disposal costs.en
dc.description.versionPeer revieweden
dc.format.extent11
dc.format.extent283-293
dc.format.mimetypeapplication/pdfen_US
dc.identifier.citationNoor, I E, Coenen, J, Martin, A, Dahl, O & Åslin, M 2019, ' Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation ', Journal of Membrane Science, vol. 579, pp. 283-293 . https://doi.org/10.1016/j.memsci.2019.02.067en
dc.identifier.doi10.1016/j.memsci.2019.02.067en_US
dc.identifier.issn0376-7388
dc.identifier.otherPURE UUID: f2578b59-0458-4944-a9dc-3f4087f82e4den_US
dc.identifier.otherPURE ITEMURL: https://research.aalto.fi/en/publications/f2578b59-0458-4944-a9dc-3f4087f82e4den_US
dc.identifier.otherPURE LINK: http://www.scopus.com/inward/record.url?scp=85062439874&partnerID=8YFLogxKen_US
dc.identifier.otherPURE FILEURL: https://research.aalto.fi/files/32471288/1_s2.0_S0376738818332290_main.pdfen_US
dc.identifier.urihttps://aaltodoc.aalto.fi/handle/123456789/37405
dc.identifier.urnURN:NBN:fi:aalto-201904022536
dc.language.isoenen
dc.publisherElsevier Science B.V.
dc.relation.ispartofseriesJournal of Membrane Scienceen
dc.relation.ispartofseriesVolume 579en
dc.rightsopenAccessen
dc.subject.keywordMembrane distillationen_US
dc.subject.keywordTechno-economic analysisen_US
dc.subject.keywordTetramethylammonium hydroxideen_US
dc.subject.keywordWaste heaten_US
dc.subject.keywordWastewateren_US
dc.titleExperimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillationen
dc.typeA1 Alkuperäisartikkeli tieteellisessä aikakauslehdessäfi
dc.type.versionpublishedVersion
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[article-cris] Kemian tekniikan korkeakoulu / CHEM