New nanoporous anti-reflective coating by water treatment of ALD deposited Al2O3
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Journal Title
Journal ISSN
Volume Title
Sähkötekniikan korkeakoulu |
Master's thesis
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Author
Date
2016-06-13
Department
Major/Subject
Micro and Nanotechnology
Mcode
S3010
Degree programme
EST - Master’s Programme in Micro and Nanotechnology (TS2005)
Language
en
Pages
v+43+1
Series
Abstract
In this work a process for fabricating nanoporous alumina anti-reflective coatings was developed. Anti-reflective coatings were designed for air-glass interface and soda-lime glass was used in the experiments. Alumina was deposited on glass by atomic layer deposition, and then transformed into nanoporous state by immersion in heated de-ionized water. The conditions for nanoporous alumina creation by de-ionized water treatment were investigated and the resulted structure was analysed with ellipsometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The transmittance of the coated glass was measured in a Cary 7000 spectrometer, showing excellent broadband and omnidirectional performance. The average transmittance for a visible range of spectrum of a double-side coated glass is up to 99.3 % versus 91.9 % for a non-coated glass. The transmittance for 70 ° incident light is 85.6 % which is 13.9 % higher than for pure glass.Description
Supervisor
Sopanen, MarkkuThesis advisor
Kauppinen, ChristofferKeywords
anti-reflective coating, nanoporous materials, atomic layer deposition, alumina
