Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

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Journal Title
Journal ISSN
Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
Date
2014
Major/Subject
Mcode
Degree programme
Language
en
Pages
5
1-5
Series
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 32, issue 1
Description
Keywords
adhesion, atomic layer deposition, failure analysis, microelectromechanical structures and systems (MEMS), reliability testing methods
Other note
Citation
Lyytinen , J , Berdova , M , Franssila , S & Koskinen , J 2014 , ' Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 32 , no. 1 , 01A102 , pp. 1-5 . https://doi.org/10.1116/1.4827197