Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

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openAccess

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Journal Title

Journal ISSN

Volume Title

A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä

Date

2014

Major/Subject

Mcode

Degree programme

Language

en

Pages

5
1-5

Series

JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 32, issue 1

Description

Keywords

adhesion, atomic layer deposition, failure analysis, microelectromechanical structures and systems (MEMS), reliability testing methods

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Citation

Lyytinen , J , Berdova , M , Franssila , S & Koskinen , J 2014 , ' Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 32 , no. 1 , 01A102 , pp. 1-5 . https://doi.org/10.1116/1.4827197