Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

Thumbnail Image
Access rights
openAccess
Journal Title
Journal ISSN
Volume Title
A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä
This publication is imported from Aalto University research portal.
View publication in the Research portal
View/Open full text file from the Research portal
Other link related to publication
Author
Date
2014
Department
Department of Materials Science and Engineering
Department of Chemistry and Materials Science
Major/Subject
Mcode
Degree programme
Language
en
Pages
5
1-5
Series
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 32, issue 1
Description
Keywords
adhesion, atomic layer deposition, failure analysis, microelectromechanical structures and systems (MEMS), reliability testing methods
Other note
DOI
10.1116/1.4827197
Citation
Lyytinen , J , Berdova , M , Franssila , S & Koskinen , J 2014 , ' Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 32 , no. 1 , 01A102 , pp. 1-5 . https://doi.org/10.1116/1.4827197
Permanent link to this item
https://urn.fi/URN:NBN:fi:aalto-201609083755
Collections
[article-cris] Kemian tekniikan korkeakoulu / CHEM