Kisel-kiseldioxidgränsytans karakterisering med hjälp av konduktansmetoden
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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology |
Diplomityö
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Author
Date
1985
Department
Major/Subject
Elektronifysiikka
Mcode
01.69
Degree programme
Language
sv
Pages
103
Series
Description
Supervisor
Sinkkonen, JuhaKeywords
MOS, kisel-kiseldioxididgränsytan, koduktansmätningar, yttillstånd, oxidladdningar