Entalpiasondin kehittäminen lämpötilanmittauksiin RF-plasmaympäristössä

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Journal Title
Journal ISSN
Volume Title
Helsinki University of Technology | Diplomityö
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Date
1992
Major/Subject
Metallurgia
Mcode
Mak-37
Degree programme
Language
fi
Pages
49
Series
Description
Supervisor
Holappa, Lauri
Keywords
Other note
Citation