Entalpiasondin kehittäminen lämpötilanmittauksiin RF-plasmaympäristössä

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Journal Title

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Volume Title

Helsinki University of Technology | Diplomityö
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Date

1992

Major/Subject

Metallurgia

Mcode

Mak-37

Degree programme

Language

fi

Pages

49

Series

Description

Supervisor

Holappa, Lauri

Keywords

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