Galliumnitridin kasvatus galliumarsenidin päälle
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Helsinki University of Technology |
Diplomityö
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Date
2002
Department
Major/Subject
Optoelektroniikka
Mcode
S-104
Degree programme
Language
fi
Pages
61
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Description
Supervisor
Lipsanen, HarriThesis advisor
Toivonen, JuhaKeywords
gallium nitride, galliumnitridi, gallium arsenide, galliumarsenidi, MOVPE, MOVPE, cubic, kuutiollinen, superlattice, superhila, nuclear layer, ydintymiskerros, AFM, AFM, dimethylhydrazine, dimetyylihydratsiini, thermal annealing, lämpökäsittely