Micropower circuit blocks for an interface ASIC for a three-axis capacitive micro-accelerometer
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Helsinki University of Technology |
Licentiate thesis
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S-87
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en
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69
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Halonen, KariThesis advisor
Laiho, MikaKeywords
capacitive sensor interface circuit, kapasitiivinen anturirajapinta, microelectromechanical system (MEMS), mikrosähkömekaaninen järjestelmä (MEMS), three-axis accelerometer, kolmiakselinen kiihtyvyysanturi, low-power cicuit, matalatehonkulutuksinen piiri, switched-capacitor circuit, SC-piiri, time multiplexing, aikamultipleksaus