Low temperature atomic layer deposition of hafnium oxide and manganese doped zinc sulphide for electroluminescent displays

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Journal Title

Journal ISSN

Volume Title

Kemian tekniikan korkeakoulu | Master's thesis

Date

2023-06-13

Department

Major/Subject

Functional Materials

Mcode

CHEM3025

Degree programme

Master's Programme in Chemical, Biochemical and Materials Engineering

Language

en

Pages

73+4

Series

Description

Supervisor

Franssila, Sami

Thesis advisor

Holopainen, Jani

Keywords

atomic layer deposition, ALD, electroluminescence, EL display, low temperature

Other note

Citation