Low temperature atomic layer deposition of hafnium oxide and manganese doped zinc sulphide for electroluminescent displays
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URL
Journal Title
Journal ISSN
Volume Title
Kemian tekniikan korkeakoulu |
Master's thesis
Authors
Date
2023-06-13
Department
Major/Subject
Functional Materials
Mcode
CHEM3025
Degree programme
Master's Programme in Chemical, Biochemical and Materials Engineering
Language
en
Pages
73+4
Series
Description
Supervisor
Franssila, SamiThesis advisor
Holopainen, JaniKeywords
atomic layer deposition, ALD, electroluminescence, EL display, low temperature