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Characterization Methods for Epitaxial Silicon Layers and Evaluation of Layers by Lifetime measurements

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.advisor Ahopelto, Jouni
dc.contributor.author Janhunen, Marko
dc.date.accessioned 2020-12-03T20:24:07Z
dc.date.available 2020-12-03T20:24:07Z
dc.date.issued 1997
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/84814
dc.format.extent 77
dc.language.iso fi en
dc.title Characterization Methods for Epitaxial Silicon Layers and Evaluation of Layers by Lifetime measurements en
dc.title Epitaktisten piikerrosten karakterisointimenetelmät ja arviointi elinaikamittauksin fi
dc.contributor.school Teknillinen korkeakoulu fi
dc.contributor.school Helsinki University of Technology en
dc.contributor.department Sähkö- ja tietoliikennetekniikan osasto fi
dc.subject.keyword CVD en
dc.subject.keyword CVD fi
dc.subject.keyword lifetime en
dc.subject.keyword elinaika fi
dc.subject.keyword recombination en
dc.subject.keyword rekombinaatio fi
dc.subject.keyword resisitivity en
dc.subject.keyword resistiivisyys fi
dc.subject.keyword layer thickness en
dc.subject.keyword kerrospaksuus fi
dc.subject.keyword DLTS en
dc.subject.keyword DLTS fi
dc.subject.keyword crystal defect en
dc.subject.keyword kidevirhe fi
dc.identifier.urn URN:NBN:fi:aalto-2020120343652
dc.programme.major Elektronifysiikka fi
dc.programme.mcode S-69 fi
dc.type.ontasot Master's thesis en
dc.type.ontasot Pro gradu -tutkielma fi
dc.contributor.supervisor Kuivalainen, Pekka
local.aalto.openaccess no
local.aalto.digifolder Aalto_33471
dc.rights.accesslevel closedAccess
local.aalto.idinssi 11984
dc.type.publication masterThesis
dc.type.okm G2 Pro gradu, diplomityö
local.aalto.digiauth ask

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