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Nickel: A very fast diffuser in silicon

Lindroos, Jeanette; Fenning, David P.; Backlund, Daniel J.; Verlage, Erik; Gorgulla, Angelika; Estreicher, Stefan K.; Savin, Hele; Buonassisi, Tonio (AIP Publishing, 2013)

Journal of Applied Physics, Volume 113, Number 20
Sähkötekniikan korkeakoulu

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