Identification and control of deposition processes

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.advisor Tenno, Robert, Prof. Mendelson, Alexander 2012-08-24T08:01:33Z 2012-08-24T08:01:33Z 2010
dc.identifier.isbn 978-952-60-3127-9 (electronic)
dc.identifier.isbn 978-952-60-3126-2 (printed) #8195;
dc.identifier.issn 0356-0872
dc.description.abstract The electrochemical deposition process is defined as the production of a coating on a surface from an aqueous solution composed of several substances. Electrochemical deposition processes are characterized by strong nonlinearity, large complexity and disturbances. Therefore, improving production quality requires the identification of a reasonably accurate model which should be found from data in a reasonable amount of time and with a reasonable computational effort. This identification makes it possible to predict the behavior of unmeasured signals and design a control algorithm to meet the demands of consumers. This thesis addresses the identification and control of the deposition processes. A model for an electrochemical cell that takes into account both electrode interfaces and the activity of ions participating in the deposition process is developed and a method for taking into account uncompensated resistance is proposed. Identifiability of two models, the conventional model and the developed model, is investigated under step and sweep form of applied voltage. It is proven that conventional electrochemical cell model can be identified uniquely using a series of step voltage experiments or in a single linear sweep voltammetry experiment on the basis of the measurements of cell current. The Zakai filtering and pathwise filtering methods are applied to a nonlinear in the parameters electrochemical cell model to estimate the electrode kinetics and mass-transfer parameters of the copper electrodeposition process. In the case of known parameters the feedforward controllers that force the concentration at the boundary to follow the desired reference concentration are designed for the deposition processes. The adaptive boundary concentration control problem for the electrochemical cell with simultaneous parameter identification is solved using the Zakai filtering method. Using such a control, depletion in industrial applications, such as copper deposition baths, can be avoided. An identification method for identifying kinetic parameters and a time-varying mixed potential process of the nonlinear electroless nickel plating model is proposed. The method converts the original nonlinear time-varying identification problem into a time-invariant quadratic optimization problem solvable by conventional least squares. en
dc.format.extent Verkkokirja (1698 KB, 126 s.)
dc.format.mimetype application/pdf
dc.language.iso en en
dc.publisher Aalto-yliopiston teknillinen korkeakoulu en
dc.relation.ispartofseries Report / Helsinki University of Technology, Control Engineering, 166 en
dc.subject.other Automation
dc.subject.other Chemistry
dc.title Identification and control of deposition processes en
dc.type G4 Monografiaväitöskirja fi Aalto-yliopiston teknillinen korkeakoulu fi
dc.contributor.department Automaatio- ja systeemitekniikan laitos fi
dc.contributor.department Department of Automation and Systems Technology en
dc.subject.keyword identification en
dc.subject.keyword parameter estimation en
dc.subject.keyword nonlinear filtering en
dc.subject.keyword diffusion equation en
dc.subject.keyword electrode kinetics en
dc.identifier.urn URN:ISBN:978-952-60-3127-9
dc.type.dcmitype text en
dc.type.ontasot Väitöskirja (monografia) fi
dc.type.ontasot Doctoral dissertation (monograph) en
dc.contributor.supervisor Koivo, Heikki, Prof.

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