Series: |
SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014, Proceedings of SPIE, Volume 8982 |
Citation:
Roussey , M , Häyrinen , M , Säynätjoki , A , Gandhi , V , Karvonen , L , Stenberg , P , Kuittinen , M & Honkanen , S 2014 , Low-loss titanium dioxide strip waveguides by atomic layer deposition . in M J. F. Digonnet & S Jiang (eds) , SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014 . , UNSP 89820E , Proceedings of SPIE , vol. 8982 , SPIE . DOI: 10.1117/12.2038912
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