Low-loss titanium dioxide strip waveguides by atomic layer deposition

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Low-loss titanium dioxide strip waveguides by atomic layer deposition

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Title: Low-loss titanium dioxide strip waveguides by atomic layer deposition
Author(s): Roussey, Matthieu ; Häyrinen, Markus ; Säynätjoki, Antti ; Gandhi, Vishal ; Karvonen, Lasse ; Stenberg, Petri ; Kuittinen, Markku ; Honkanen, Seppo
Date: 2014
Language: en
Department: Department of Micro and Nanosciences
ISBN: 978-0-8194-9895-3
Series: SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014, Proceedings of SPIE, Volume 8982
ISSN: 0277-786X
DOI-number: 10.1117/12.2038912
Subject: 213 Electronic, automation and communications engineering, electronics, 216 Materials engineering, 221 Nanotechnology, 114 Physical sciences, 116 Chemical sciences, 318 Medical biotechnology
Keywords: 213 Electronic, automation and communications engineering, electronics, 216 Materials engineering, 221 Nanotechnology, 114 Physical sciences, 116 Chemical sciences, 318 Medical biotechnology
 

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Citation:

Roussey , M , Häyrinen , M , Säynätjoki , A , Gandhi , V , Karvonen , L , Stenberg , P , Kuittinen , M & Honkanen , S 2014 , Low-loss titanium dioxide strip waveguides by atomic layer deposition . in M J. F. Digonnet & S Jiang (eds) , SPIE Photonics West 2014, San Francisco, California, USA, February 1-6, 2014 . , UNSP 89820E , Proceedings of SPIE , vol. 8982 , SPIE . DOI: 10.1117/12.2038912
 
Permanent link to this item:  http://urn.fi/URN:NBN:fi:aalto-201812105976
 
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