Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.author Broas, Mikael
dc.contributor.author Liu, Xuwen
dc.contributor.author Ge, Yanling
dc.contributor.author Mattila, Toni Tuomas
dc.contributor.author Paulasto-Kröckel, Mervi
dc.date.accessioned 2018-08-01T12:40:17Z
dc.date.available 2018-08-01T12:40:17Z
dc.date.issued 2015
dc.identifier.citation Broas , M , Liu , X , Ge , Y , Mattila , T T & Paulasto-Kröckel , M 2015 , ' Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices ' JOURNAL OF APPLIED PHYSICS , vol 117 , no. 24 , pp. 245304-1-245304-9 . DOI: 10.1063/1.4923025 en
dc.identifier.issn 0021-8979
dc.identifier.issn 1089-7550
dc.identifier.other PURE UUID: 3564e805-12bb-41a4-b320-c6aa52b5636e
dc.identifier.other PURE ITEMURL: https://research.aalto.fi/en/publications/galvanic-corrosion-of-structural-nonstoichiometric-silicon-nitride-thin-films-and-its-implications-on-reliability-of-microelectromechanical-devices(3564e805-12bb-41a4-b320-c6aa52b5636e).html
dc.identifier.other PURE FILEURL: https://research.aalto.fi/files/26525636/1.4923025.pdf
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/32718
dc.format.extent 245304-1-245304-9
dc.format.mimetype application/pdf
dc.language.iso en en
dc.relation.ispartofseries JOURNAL OF APPLIED PHYSICS en
dc.relation.ispartofseries Volume 117, issue 24 en
dc.rights openAccess en
dc.title Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices en
dc.type A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä fi
dc.description.version Peer reviewed en
dc.contributor.department Electronics Integration and Reliability
dc.contributor.department Department of Electrical Engineering and Automation en
dc.contributor.department Department of Materials Science and Engineering en
dc.contributor.department Department of Chemistry and Materials Science en
dc.identifier.urn URN:NBN:fi:aalto-201808014118
dc.identifier.doi 10.1063/1.4923025
dc.type.version publishedVersion


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