Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices

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Title:	Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices
Author(s):	Broas, Mikael ; Liu, Xuwen ; Ge, Yanling ; Mattila, Toni Tuomas ; Paulasto-Kröckel, Mervi
Date:	2015
Language:	en
Pages:	245304-1-245304-9
Department:	Electronics Integration and Reliability Department of Electrical Engineering and Automation Department of Materials Science and Engineering Department of Chemistry and Materials Science
Series:	JOURNAL OF APPLIED PHYSICS, Volume 117, issue 24
ISSN:	0021-8979 1089-7550
DOI-number:	10.1063/1.4923025
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Citation: Broas , M , Liu , X , Ge , Y , Mattila , T T & Paulasto-Kröckel , M 2015 , ' Galvanic corrosion of structural non-stoichiometric silicon nitride thin films and its implications on reliability of microelectromechanical devices ' , Journal of Applied Physics , vol. 117 , no. 24 , pp. 245304-1-245304-9 . https://doi.org/10.1063/1.4923025

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