Citation:
Bao , Y , Li , S , von Gastrow , G , Repo , P , Putkonen , M & Savin , H 2015 , ' Effect of substrate pretreatments on the atomic layer deposited Al2O3 passivation quality ' JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol 33 , no. 1 , 01A123 . DOI: 10.1116/1.4901456
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