Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en Singh, Akanksha Scotti, Gianmario Sikanen, Tiina Jokinen, Ville Franssila, Sami 2016-09-16T08:25:08Z 2014
dc.identifier.citation Singh , A , Scotti , G , Sikanen , T , Jokinen , V & Franssila , S 2014 , ' Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips ' MICROMACHINES , vol 5 , no. 3 , pp. 472-485 . DOI: 10.3390/mi5030472 en
dc.identifier.other PURE UUID: 2152a28a-074b-45ff-9591-22ca2f7d60cb
dc.identifier.other PURE ITEMURL:
dc.identifier.other PURE FILEURL:
dc.description.abstract This work presents patterning of thick (10–50 µm) hybrid polymer structures of ORMOCER® by laser direct writing. ORMOCER® combine polymer-like fabrication processes with glass-like surface chemistry that is beneficial for many bio-microfluidic applications. ORMOCER® is liquid before exposure, so patterning is done by contact-free lithography, such as proximity exposure. With laser direct writing, we obtained higher resolution patterns, with smaller radius of curvature (~2–4 µm), compared to proximity exposure (~10–20 µm). Process parameters were studied to find the optimal dose for different exposure conditions and ORMOCER® layer thicknesses. Two fluidic devices were successfully fabricated: a directional wetting device (fluidic diode) and an electrophoresis chip. The fluidic diode chip operation depends on the sharp corner geometry and water contact angle, and both have been successfully tailored to obtain diodicity. Electrophoresis chips were used to separate of two fluorescent dyes, rhodamine 123 and fluorescein. The electrophoresis chip also made use of ORMOCER® to ORMOCER® bonding en
dc.format.extent 472-485
dc.format.mimetype application/pdf
dc.language.iso en en
dc.relation.ispartofseries MICROMACHINES en
dc.relation.ispartofseries Volume 5, issue 3 en
dc.rights openAccess en
dc.subject.other 216 Materials engineering en
dc.subject.other 221 Nanotechnology en
dc.title Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips en
dc.type A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä fi
dc.description.version Peer reviewed en
dc.contributor.department Department of Materials Science and Engineering en
dc.contributor.department Department of Chemistry and Materials Science en
dc.subject.keyword lithography
dc.subject.keyword resist
dc.subject.keyword laser direct writing
dc.subject.keyword ORMOCER®
dc.subject.keyword microfluidics
dc.subject.keyword 216 Materials engineering
dc.subject.keyword 221 Nanotechnology
dc.identifier.urn URN:NBN:fi:aalto-201609163837
dc.identifier.doi 10.3390/mi5030472
dc.type.version publishedVersion

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