Characterization of thin film adhesion by MEMS shaft-loading blister testing

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Title:	Characterization of thin film adhesion by MEMS shaft-loading blister testing
Author(s):	Berdova, Maria ; Lyytinen, Jussi ; Grigoras, Kestuti ; Baby, Anu ; Kilpi, Lauri ; Ronkainen, Helena ; Franssila, Sami ; Koskinen, Jari
Date:	2013
Language:	en
Pages:	5 1-5
Department:	Department of Materials Science and Engineering Department of Chemistry and Materials Science
Series:	JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 31, issue 3
ISSN:	0734-2101 1520-8559
DOI-number:	10.1116/1.4801921
Keywords:	adhesion, atomic layer deposition, shaft-loading blister test, thin films
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Citation: Berdova , M , Lyytinen , J , Grigoras , K , Baby , A , Kilpi , L , Ronkainen , H , Franssila , S & Koskinen , J 2013 , ' Characterization of thin film adhesion by MEMS shaft-loading blister testing ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 31 , no. 3 , 031102 , pp. 1-5 . https://doi.org/10.1116/1.4801921

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