Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

Altmetrics



Title:	Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres
Author(s):	Lyytinen, Jussi ; Berdova, Maria ; Franssila, Sami ; Koskinen, Jari
Date:	2014
Language:	en
Pages:	5 1-5
Department:	Department of Materials Science and Engineering Department of Chemistry and Materials Science
Series:	JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 32, issue 1
ISSN:	0734-2101 1520-8559
DOI-number:	10.1116/1.4827197
Keywords:	adhesion, atomic layer deposition, failure analysis, microelectromechanical structures and systems (MEMS), reliability testing methods
» Show full item record
This publication is imported from Aalto University Research information portal: https://research.aalto.fi > View this publication in Research information portal > Other link related to publication (Research information portal) > View/Open full text file from Research information portal
Citation: Lyytinen , J , Berdova , M , Franssila , S & Koskinen , J 2014 , ' Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 32 , no. 1 , 01A102 , pp. 1-5 . https://doi.org/10.1116/1.4827197

Permanent link to this item: http://urn.fi/URN:NBN:fi:aalto-201609083755 Email this Export to RefWorks QR Code Print BibTex Tweet