Citation:
Lyytinen , J , Berdova , M , Franssila , S & Koskinen , J 2014 , ' Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres ' , JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol. 32 , no. 1 , 01A102 , pp. 1-5 . https://doi.org/10.1116/1.4827197
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