Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

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Title:	Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres
Author(s):	Lyytinen, Jussi ; Berdova, Maria ; Franssila, Sami ; Koskinen, Jari
Date:	2014
Language:	en
Pages:	5 1-5
Department:	Department of Materials Science and Engineering Department of Chemistry and Materials Science
Series:	JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A, Volume 32, issue 1
ISSN:	0734-2101 1520-8559
DOI-number:	10.1116/1.4827197
Subject:	216 Materials engineering, 221 Nanotechnology
Keywords:	adhesion, atomic layer deposition, failure analysis, microelectromechanical structures and systems (MEMS), reliability testing methods, 216 Materials engineering, 221 Nanotechnology
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Citation: Lyytinen , J , Berdova , M , Franssila , S & Koskinen , J 2014 , ' Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres ' JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A , vol 32 , no. 1 , 01A102 , pp. 1-5 . DOI: 10.1116/1.4827197

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