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Ozone-based batch atomic layer deposited Al2O3 for effective surface passivation
von Gastrow, Guillaume
;
Li, Shuo
;
Repo, Päivikki
;
Bao, Yameng
;
Putkonen, Matti
;
Savin, Hele
(
2013
)
ENERGY PROCEDIA,
Volume 38
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2013 (1)
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