Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives

Liimatainen, Ville; Virta, Antti; Routa, Iiris; Zhou, Quan

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Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives



Title:	Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives
Author(s):	Liimatainen, Ville ; Virta, Antti ; Routa, Iiris ; Zhou, Quan
Date:	2014
Language:	en
Pages:	6
Department:	Sähkötekniikan ja automaation laitos Department of Electrical Engineering and Automation
Subject:	Automation
Keywords:	micromanipulation, microassembly, ESEM
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Citation: Liimatainen, Ville & Virta, Antti & Routa, Iiris & Zhou, Quan. 2014. Hybrid Microassembly in Environmental Scanning Electron Microscope Using Robotic Manipulator and Adhesives. Micronano System Workshop (MSW 2014). 6.
Rights: © 2014 Authors.
Permanent link to this item: http://urn.fi/URN:NBN:fi:aalto-201602091254 Email this Export to RefWorks QR Code Print BibTex Tweet

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