Electroplating current profile effects on deposited Cu

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Journal ISSN
Volume Title
Sähkötekniikan korkeakoulu | Bachelor's thesis
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Date
2016-01-07
Department
Major/Subject
Bioinformaatioteknologia
Mcode
S121
ELEC3016
Degree programme
Bioinformaatioteknologia BIO
Language
en
Pages
31
Series
Description
Supervisor
Turunen, Markus
Thesis advisor
Ross, Glenn
Keywords
copper, electroplating, prc, pc
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