Electronic stopping calculated using explicit phase shift factors

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.author Sillanpää, J.
dc.contributor.author Peltola, J.
dc.contributor.author Nordlund, K.
dc.contributor.author Keinonen, J.
dc.contributor.author Puska, Martti J.
dc.date.accessioned 2015-09-18T09:01:53Z
dc.date.available 2015-09-18T09:01:53Z
dc.date.issued 2001
dc.identifier.citation Sillanpää, J. & Peltola, J. & Nordlund, K. & Keinonen, J. & Puska, Martti J. 2001. Electronic stopping calculated using explicit phase shift factors. Physical Review B. Volume 63, Issue 13. 134113/1-5. ISSN 1550-235X (electronic). DOI: 10.1103/physrevb.63.134113. en
dc.identifier.issn 1550-235X (electronic)
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/17806
dc.description.abstract Predicting range profiles of low-energy (0.1–10 keV/amu) ions implanted in materials is a long-standing problem of considerable theoretical and practical interest. We combine here the best available method for treating the nuclear slowing down, namely a molecular-dynamics range calculation method, with a method based on density-functional theory to calculate electronic slowing down for each ion-target atom pair separately. Calculation of range profiles of technologically important dopants in Si shows that the method is of comparable accuracy to previous methods for B, P, and As implantation of Si, and clearly more accurate for Al implantation of Si. en
dc.format.extent 134113/1-5
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher American Physical Society (APS) en
dc.relation.ispartofseries Physical Review B en
dc.relation.ispartofseries Volume 63, Issue 13
dc.rights © 2001 American Physical Society (APS). This is the accepted version of the following article: Sillanpää, J. & Peltola, J. & Nordlund, K. & Keinonen, J. & Puska, Martti J. 2001. Electronic stopping calculated using explicit phase shift factors. Physical Review B. Volume 63, Issue 13. 134113/1-5. ISSN 1550-235X (electronic). DOI: 10.1103/physrevb.63.134113, which has been published in final form at http://journals.aps.org/prb/abstract/10.1103/PhysRevB.63.134113. en
dc.subject.other Physics en
dc.title Electronic stopping calculated using explicit phase shift factors en
dc.type A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä fi
dc.description.version Peer reviewed en
dc.rights.holder American Physical Society (APS)
dc.contributor.school Perustieteiden korkeakoulu fi
dc.contributor.school School of Science en
dc.contributor.department Teknillisen fysiikan laitos fi
dc.contributor.department Department of Applied Physics en
dc.subject.keyword stopping power en
dc.subject.keyword ion beams en
dc.subject.keyword density-functional theory en
dc.identifier.urn URN:NBN:fi:aalto-201509174301
dc.type.dcmitype text en
dc.identifier.doi 10.1103/physrevb.63.134113
dc.type.version Final published version en


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