Relation between macroscopic and microscopic activation energies in nonequilibrium surface processing

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.author Gosálvez, M. A.
dc.contributor.author Nieminen, Risto M.
dc.date.accessioned 2015-09-04T10:13:15Z
dc.date.available 2015-09-04T10:13:15Z
dc.date.issued 2003
dc.identifier.citation Gosálvez, M. A. & Nieminen, Risto M. 2003. Relation between macroscopic and microscopic activation energies in nonequilibrium surface processing. Physical Review E. Volume 68, Issue 3. 031604/1-16. ISSN 1539-3755 (printed). DOI: 10.1103/physreve.68.031604. en
dc.identifier.issn 1539-3755 (printed)
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/17587
dc.description.abstract Realistic Monte Carlo simulations show that the apparent macroscopic activation energy is only partially explained by the expected expression for the average over the microscopic activation energies for surface processing. An additional term accounting for the existence of fluctuations in the fractions of particles has to be taken into account. In all cases considered, the additional term can be accurately estimated by a posteriori analysis of the temperature dependence of the surface densities. In addition, we demonstrate that the relative contribution of the different competing microscopic processes to the macroscopic activation energy can be accurately obtained during the simulations, allowing for the unambiguous identification of the particular surface species which effectively control the process. As an example of the nonequilibrium open interfaces to which the results apply, the case of wet chemical etching of crystalline silicon is considered. The results can be directly applied to surface growth. en
dc.format.extent 031604/1-16
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher American Physical Society (APS) en
dc.relation.ispartofseries Physical Review E en
dc.relation.ispartofseries Volume 68, Issue 3
dc.rights © 2003 American Physical Society (APS). This is the accepted version of the following article: Gosálvez, M. A. & Nieminen, Risto M. 2003. Relation between macroscopic and microscopic activation energies in nonequilibrium surface processing. Physical Review E. Volume 68, Issue 3. 031604/1-16. ISSN 1539-3755 (printed). DOI: 10.1103/physreve.68.031604, which has been published in final form at http://journals.aps.org/pre/abstract/10.1103/PhysRevE.68.031604. en
dc.subject.other Physics en
dc.title Relation between macroscopic and microscopic activation energies in nonequilibrium surface processing en
dc.type A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä fi
dc.description.version Peer reviewed en
dc.rights.holder American Physical Society (APS)
dc.contributor.school Perustieteiden korkeakoulu fi
dc.contributor.school School of Science en
dc.contributor.department Teknillisen fysiikan laitos fi
dc.contributor.department Department of Applied Physics en
dc.subject.keyword activation energies en
dc.subject.keyword surface processing en
dc.subject.keyword Monte Carlo simulations en
dc.identifier.urn URN:NBN:fi:aalto-201509024204
dc.type.dcmitype text en
dc.identifier.doi 10.1103/physreve.68.031604
dc.type.version Final published version en


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