Rights:
© 2011 American Physical Society (APS). This is the accepted version of the following article: Slotte, J. & Kilpeläinen, S. & Tuomisto, Filip & Räisänen, J. & Larsen, A. Nylandsted. 2011. Direct observations of the vacancy and its annealing in germanium. Physical Review B. Volume 83, Issue 23. 235212/1-5. ISSN 1098-0121 (printed). DOI: 10.1103/physrevb.83.235212, which has been published in final form at http://journals.aps.org/prb/abstract/10.1103/PhysRevB.83.235212.