Title: | Silicon-based surface micromachined interferometers for infrared wavelengths Piipohjaiset pintamikromekaaniset interferometrit infrapuna-aallonpituuksille |
Author(s): | Tuohiniemi, Mikko |
Date: | 2015 |
Language: | en |
Pages: | 97 |
Department: | Materiaalitekniikan laitos Department of Materials Science and Engineering |
ISBN: | 978-952-60-6178-8 (electronic) 978-952-60-6177-1 (printed) |
Series: | Aalto University publication series DOCTORAL DISSERTATIONS, 54/2015 |
ISSN: | 1799-4942 (electronic) 1799-4934 (printed) 1799-4934 (ISSN-L) |
Supervising professor(s): | Franssila, Sami, Prof., Aalto University, Department of Materials Science and Engineering, Finland |
Thesis advisor(s): | Franssila, Sami, Prof., Aalto University, Department of Materials Science and Engineering, Finland |
Subject: | Materials science |
Keywords: | Fabry-Perot, MEMS, micromechanics, interferometer, silicon, mikromekaniikka, interferometri, pii |
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Abstract:Fabry-Perot interferometri (FPI) on säädettävä optinen kaistanpäästösuodin. Mikromekaaninen (MEMS) toteutus mahdollistaa hyvin pienen interferometrin massatuotannon ja alhaisen yksikköhinnan. Teolliselle tuotannolle tyypillinen yksikköhinta olisi kymmenen euron luokkaa, koko muutama neliömilli ja tuotantomäärä miljoonia yksiköitä |
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Parts:[Publication 1]: Tuohiniemi, Mikko; Blomberg, Martti. 2011. Surface-micromachined silicon air-gap Bragg reflector for thermal infrared. IOP Publishing. J. Micromech. Microeng., volume 21, issue 7, pages 075014 (7pp). ISSN 1361-6439. DOI 10.1088/0960-1317/21/7/075014. View at Publisher [Publication 2]: Tuohiniemi, Mikko; Blomberg, Martti; Akujärvi, Altti; Antila, Jarkko; Saari, Heikki. 2012. Optical transmission performance of a surface-micromachined Fabry–Pérot interferometer for thermal infrared. IOP Publishing. J. Micromech. Microeng., volume 22, issue 11, pages 115004 (7pp). ISSN 1361-6439. DOI 10.1088/0960-1317/22/11/115004. View at Publisher [Publication 3]: Tuohiniemi, Mikko; Näsilä, Antti; Mäkynen, Jussi. 2013. Characterization of the tuning performance of a micro-machined Fabry–Pérot interferometer for thermal infrared. IOP Publishing. J. Micromech. Microeng., volume 23, issue 7, pages 075011 (7pp). ISSN 1361-6439. DOI 10.1088/0960-1317/23/7/075011. View at Publisher [Publication 4]: Tuohiniemi, Mikko; Blomberg, Martti; Gao, Feng. 2013. Infrared Spectroscopy Study of a Poly-Silicon Film for Optimizing the Boron-Implanting Dose. IEEE. J. Microelectromech. S., volume 22, issue 5, pages 1207 - 1212. ISSN 1057-7157. DOI 10.1109/JMEMS.2013.2262580. View at Publisher [Publication 5]: Tuohiniemi, Mikko; Näsilä, Antti; Akujärvi, Altti; Blomberg, Martti. 2014. MOEMS Fabry-Pérot interferometer with point-anchored Si-air mirrors for middle infrared. IOP Publishing. J. Micromech. Microeng., volume 24, issue 9, pages 095019 (9pp). ISSN 1361-6439. DOI 10.1088/0960-1317/24/9/095019. View at Publisher |
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