Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.author Lipiäinen, Lauri
dc.contributor.author Jaakkola, Antti
dc.contributor.author Kokkonen, Kimmo
dc.contributor.author Kaivola, Matti
dc.date.accessioned 2015-04-28T09:43:56Z
dc.date.available 2015-04-28T09:43:56Z
dc.date.issued 2012
dc.identifier.citation Lipiäinen, Lauri & Jaakkola, Antti & Kokkonen, Kimmo & Kaivola, Matti. 2012. Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator. Applied Physics Letters. Volume 100, Issue 15. 153508. ISSN 1077-3118 (electronic). ISSN 0003-6951 (printed). DOI: 10.1063/1.3703119. en
dc.identifier.issn 1077-3118 (electronic)
dc.identifier.issn 0003-6951 (printed)
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/15789
dc.description.abstract We present an experimental study of the nonlinear behavior of a square-extensional (SE) mode microelectromechanicalresonator, actuated with a piezoelectricAlNthin film. The acoustic vibration fields of the device are characterized using laser probing. A nonlinear vibration behavior of the SE mode is observed above a drive power level of −10 dBm such that the vibration amplitude of the SE mode saturates and a rotational in-plane vibration mode is excited at a significantly lower frequency (0.725 MHz) than the SE mode (16.670 MHz). Interestingly, the measured∼10 nm saturation amplitude of the SE mode is more than a decade below the amplitude value at which mechanical or electromechanical nonlinearities are estimated to become significant. en
dc.format.extent 153508
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher AIP Publishing en
dc.relation.ispartofseries Applied Physics Letters en
dc.relation.ispartofseries Volume 100, Issue 15
dc.rights © 2012 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/apl en
dc.subject.other Physics en
dc.title Nonlinear excitation of a rotational mode in a piezoelectrically excited square-extensional mode resonator en
dc.type A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä fi
dc.description.version Peer reviewed en
dc.rights.holder American Intitute of Physics (AIP)
dc.contributor.school Perustieteiden korkeakoulu fi
dc.contributor.school School of Science en
dc.contributor.department Teknillisen fysiikan laitos fi
dc.contributor.department Department of Applied Physics en
dc.subject.keyword microelectromechanical resonators en
dc.subject.keyword MEMS resonators en
dc.subject.keyword silicon resonators en
dc.subject.keyword acoustic behavior en
dc.subject.keyword square-extensional (SE) mode en
dc.subject.keyword vibration fields en
dc.identifier.urn URN:NBN:fi:aalto-201504272450
dc.type.dcmitype text en
dc.identifier.doi 10.1063/1.3703119
dc.type.version Final published version en


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