Citation:
Äyräs, Pekka & Friberg, Ari T. & Kaivola, Matti & Salomaa, Martti M.. 1997. Conoscopic interferometry of wafers for surface-acoustic wave devices. Journal of Applied Physics. Volume 82, Issue 8. 4039-4042. ISSN 1089-7550 (electronic). ISSN 0021-8979 (printed). DOI: 10.1063/1.365755.
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