Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.author Lipiäinen, Lauri
dc.contributor.author Kokkonen, Kimmo
dc.contributor.author Kaivola, Matti
dc.date.accessioned 2015-04-28T09:43:44Z
dc.date.available 2015-04-28T09:43:44Z
dc.date.issued 2010
dc.identifier.citation Lipiäinen, Lauri & Kokkonen, Kimmo & Kaivola, Matti. 2010. Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization. Journal of Applied Physics. Volume 108, Issue 11. 114510. ISSN 1089-7550 (electronic). ISSN 0021-8979 (printed). DOI: 10.1063/1.3504636. en
dc.identifier.issn 1089-7550 (electronic)
dc.identifier.issn 0021-8979 (printed)
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/15786
dc.description.abstract A detection scheme for obtaining phase and absolute amplitude information of surface vibrations on microacoustic components using homodyne laser interferometry is described. The scheme does not require active stabilization of the optical path length of the interferometer. The detection setup is realized in a homodyneMichelson interferometer configuration, and selected measurements on a 374 MHz surface acoustic wave fan-shaped filter and two different piezoelectrically actuated micromechanical resonators are presented to demonstrate the performance of the instrument. With the current detection electronics, the interferometer is capable of detecting out-of-plane surface vibrations up to 2 GHz with a lateral resolution of better than 1 μm and with a minimum detectable vibration amplitude of ∼1 pm. en
dc.format.extent 114510
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher AIP Publishing en
dc.relation.ispartofseries Journal of Applied Physics en
dc.relation.ispartofseries Volume 108, Issue 11
dc.rights © 2010 American Intitute of Physics (AIP). This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/jap en
dc.subject.other Physics en
dc.title Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization en
dc.type A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä fi
dc.description.version Peer reviewed en
dc.rights.holder American Intitute of Physics (AIP)
dc.contributor.school Perustieteiden korkeakoulu fi
dc.contributor.school School of Science en
dc.contributor.department Teknillisen fysiikan laitos fi
dc.contributor.department Department of Applied Physics en
dc.subject.keyword surface vibrations en
dc.subject.keyword microacoustic components en
dc.subject.keyword homodyne laser interferometry en
dc.subject.keyword detection methods en
dc.subject.keyword absolute amplitude en
dc.subject.keyword homodyne interferometer en
dc.identifier.urn URN:NBN:fi:aalto-201504272447
dc.type.dcmitype text en
dc.identifier.doi 10.1063/1.3504636
dc.type.version Final published version en


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