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Glass Polarization Induced Drift in Microelectromechanical Capacitor

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dc.contributor Aalto-yliopisto fi
dc.contributor Aalto University en
dc.contributor.author Haarahiltunen, Antti
dc.contributor.author Varpula, Aapo
dc.contributor.author Leinvuo, Jouni
dc.contributor.author Siren, Esko
dc.contributor.author Rytkönen, Vesa-Pekka
dc.contributor.author Savin, Hele
dc.date.accessioned 2015-04-09T09:01:17Z
dc.date.available 2015-04-09T09:01:17Z
dc.date.issued 2012
dc.identifier.citation Haarahiltunen, Antti & Varpula, Aapo & Leinvuo, Jouni & Siren, Esko & Rytkönen, Vesa-Pekka & Savin, Hele. 2012. Glass Polarization Induced Drift in Microelectromechanical Capacitor. Journal of Applied Physics. Volume 111, Number 10. 1089-7550 (electronic). DOI: 10.1063/1.4720378 en
dc.identifier.issn 1089-7550 (electronic)
dc.identifier.issn 0021-8979 (printed)
dc.identifier.uri https://aaltodoc.aalto.fi/handle/123456789/15599
dc.description.abstract We present a quantitative physical model for glass substrate polarization and study the glasspolarization by measuring the capacitance drift from microelectromechanicalcapacitor test structure. The model consists of mobile and immobile charge species, which are related to alkali metals and non-bridging oxygen in glass. The model explains consistently our results and the previously observed non-homogeneous charging effect in a radio-frequency switch fabricated on a glass substrate. The results indicate that the bulk properties of the glass layer itself can be a significant source of drift. The modeling allows estimation of the drift behavior of the several kinds of device structures. en
dc.format.extent 4
dc.format.mimetype application/pdf en
dc.language.iso en en
dc.publisher AIP Publishing en
dc.relation.ispartofseries Journal of Applied Physics en
dc.relation.ispartofseries Volume 111, Number 10
dc.rights Copyright 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. http://scitation.aip.org/content/aip/journal/jap en
dc.subject.other Electrical engineering en
dc.subject.other Physics en
dc.title Glass Polarization Induced Drift in Microelectromechanical Capacitor en
dc.type A1 Alkuperäisartikkeli tieteellisessä aikakauslehdessä fi
dc.description.version Peer reviewed en
dc.rights.holder American Institute of Physics
dc.contributor.school Sähkötekniikan korkeakoulu fi
dc.contributor.school School of Electrical Engineering en
dc.contributor.department Department of Micro and Nanosciences en
dc.contributor.department Mikro- ja nanotekniikan laitos fi
dc.subject.keyword glass polarization en
dc.subject.keyword microelectromechanical capacitor en
dc.subject.keyword glass substrate en
dc.subject.keyword capacitance drift en
dc.subject.keyword drift behaviour en
dc.subject.keyword physical models en
dc.subject.keyword MEM capacitor en
dc.identifier.urn URN:NBN:fi:aalto-201504092252
dc.type.dcmitype text en
dc.identifier.doi 10.1063/1.4720378
dc.type.version Final published version en

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